Calibration Standards

The MRS-3 is a universal magnification calibration standard suitable for a wide range of instrumentation. Magnifications from 10X to 50,000X. 2µm minimum pitch. Traceable to national labs for ISO9000 and ISO17025.

A fifth Generation, high magnification reference standard for instrument calibration from 10X to 200,000X (1/2µm minimum pitch). NIST and NPL traceable for ISO9000 and ISO17025.

A fifth generation Magnification Reference Standard & Stage Micrometer for instrument calibration from 1,500X to 1,000,000X (80nm minimum pitch). NIST and NPL traceable for ISO9000 and ISO17025.

Geller MicroAnalytical magnification standards can be cleaned and re-certified to assure continued use as a traceable standard.

The 145nm pitch is accurate to ±1nm.

292nm pitch reference standard for very high resolution calibration of AFM.

2-D holographic array standards for simultaneous calibration of X and Y axes.

HOPG is widely used as a substrate for specimens to be examined in scanning probe microscopy.

Gold colloids of known size provide a reliable means of characterising tip geometry and calibrating the Z-axis to piezoelectric response.

Calibration gratings arrays of different structures comprising rectangular silicon dioxide steps on a silicon wafer.

The TGX series silicon calibration grating is an array of square holes with sharp undercut edges formed by the (110) crystallographic planes of silicon. The typical radius of the edges is less than 5 nm

Sets of calibration gratings and test structures are available to suit different requirements.

The calibration gratings feature one-dimensional arrays of trapezoidal steps etched into a silicon substrate.

Sample for characterisation of tip shape with hard sharp pyramidal nanostructures. The structures are covered by a highly wear-resistant layer.

Highly ordered pyrolytic graphite (HOPG) is a lamellar material and consists of stacked planes.

This CD calibration test specimen comprises five line patterns, each one clearly identified by its pitch.

This advanced CD calibration test specimen is suitable for calibrating smaller structures.