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Calibration gratings - TGXYZ series

Calibration gratings - TGXYZ series

Calibration gratings arrays of different structures comprising rectangular silicon dioxide steps on a silicon wafer.

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Description Tech Data

Name & Code

Grouped product items
Code & Description	Availability	Price	Qty
AGF7021 Grating TGXYZ01 Step Height 20nm Loading...	Loading...	£206.10	£206.10
AGF7022 Grating TGXYZ02 Step Height 100nm Loading...	Loading...	£197.45	£197.45
AGF7023 Grating TGXYZ03 Step Height 500nm Loading...	Loading...	£197.45	£197.45

Product Description

Calibration gratings from the TGXYZ series are arrays of different structures comprising rectangular silicon dioxide steps on a silicon wafer. The small square in the center with dimensions 500μm by 500μm includes circular pillars and holes, as well as lines in the X- and Y- direction with a pitch of 5μm. The large square with dimensions 1mm by 1mm contains square pillars and holes with a pitch of 10μm.

The TGXYZ calibration gratings are intended for vertical and lateral calibration of SPM scanners. The vertical non-linearity can be compensated for by using several calibration gratings with different nominal step heights.

The TGXYZ series of Calibration Gratings are supplied mounted on a round 12mm dia metal plate. They are also available unmounted if required.

Active area: 1 x 1mm

Chip dimensions: 5 x 5 x 0.3mm

Technical Data

Cat. no.	Part number	Step height*	Height accuracy	Pitch	Pitch accuracy
AGF7021	TGXYZ01	20nm	2%	5 and 10μm	0.1μm
AGF7022	TGXYZ02	100nm	3%	5 and 10μm	0.1μm
AGF7023	TGXYZ03	500nm	3%	5 and 10μm	0.1μm
The dimensions marked * are given for reference only. The actual step height, shown on the label of the individual grating box may differ slightly from the nominal value.

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