Grating type TGX
The TGX series silicon calibration grating is an array of square holes with sharp undercut edges formed by the (110) crystallographic planes of silicon. The typical radius of the edges is less than 5 nm
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The silicon calibration grating from the TGX series is an array of square holes with sharp undercut edges formed by the (110) crystallographic planes of silicon. The typical radius of the edges is less than 5 nm.
Application
The TGX calibration gratings are intended for lateral calibration of SPM scanners. They can also be used for:
- detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects;
- determination of the tip aspect ratio
For accurate quantification of images of calibration gratings from the TGX series, we recommend using the Scanning Probe Image Processor (SPIP) designed by Image Metrology.