SEM resolution is tested in terms of a combination of criteria, namely resolved gaps and the number of grey levels in the image. This is to ensure that the resolution has not been distorted by using the contrast to maximise visibility of edges. High resolution images ideally should show fine detail together with a lack of noise, evidenced by a good range of grey levels.
For assessments of resolution in scanning electron microscopes, we have developed a range of gold on carbon and tin on carbon test specimens. These specimens are suitable for tests of SE and BSE imaging and also for chemical mapping in high resolution systems such as in Auger scanning instruments.
The specimens can be supplied on most types of specimen stub.
SEM 144nm Reference StandardThese 2-D holographic array standards for simultaneous calibration of X and Y axes have unique characteristics that make them easy to use for AFM, STM, Auger, FIB and SEM.Call for leadtimePOA
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SEM 144nm Reference Standard, CertifiedThese 2-D holographic array standards for simultaneous calibration of X and Y axes have unique characteristics that make them easy to use for AFM, STM, Auger, FIB and SEM.Call for leadtimePOA
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SEM 300nm Reference StandardThese 2-D holographic array standards for simultaneous calibration of X and Y axes have unique characteristics that make them easy to use for AFM, STM, Auger, FIB and SEM.Call for leadtimePOA
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